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英國Ionoptika
日本ULVAC-PHI公司于2004年11月12日宣布，與離子槍生產(chǎn)商英國Ionoptika公司聯(lián)合開發(fā)出了以C60為離子源的濺鍍機(jī)離了槍，并已經(jīng)開始銷售。其特點(diǎn)是能夠在不破壞成份和結(jié)構(gòu)的情況下以1nm(深度方向)的誤差，對有機(jī)薄膜樣本的表面進(jìn)行切削或?yàn)R射清除。該公司表示“可對有機(jī)薄膜進(jìn)行低損傷蝕刻，這在此前是做不到的”。
Ionoptika is an ion beam technology company committed to the development of high performance and novel ion beam systems.

We offer these systems to instrument manufacturers and to research groups for upgrade of analytical or process instrumentation.

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We manufacture a range of ion guns with related electronic and vacuum components for use in micromachining and analysis applications. Custom design work is also undertaken, including complete instrument systems.

The following areas of expertise are available at Ionoptika:

Ion-optical design
Mechanical design - using 3D CAD.
Electronics design – high voltage and digital control
Manufacture and Test of UHV assemblies
Manufacture and Test of electronics
Instrumental control software

Ionoptika has a wealth of experience in ion beam science within its own technology group. We also benefit from close association with leading scientists in the fields of ion-optical design and analytical chemistry.

Location and Facilities

Ionoptika is located at Warrior Park, just outside Southampton in the U.K. In the Warrior Park unit, Ionoptika is fully equipped with assembly and test facilities for ion guns, sources, or other high vacuum instrumentation
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